391 Airport Industrial Drive, Ypsilanti, Michigan 48198
Phone: (734) 547-9896 Ext 125 Fax: (734) 547-9964 Email: sales@nanogetters.com

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NanoGetter® MEMS Price Sheet

For 100mm wafers only, in cases where the NanoGetters® are deposited on a capping wafer.

Quantity	Total Turnkey Solution: Silicon Cap Wafers with NanoGetters®, and Bonding	Silicon Cap Wafers with NanoGetters® and Frit Printing (No Bonding)	NanoGetter® Deposition Only (No Cap Wafer Fabrication or Bonding)
< 100 wafers	$1200/wafer	$850/wafer	$400/wafer
1000 wafers	$710/wafer	$560/wafer	$195/wafer
10,000 wafers	$280/wafer	$230/wafer	$90/wafer
Tooling Charges*	$6,000	$6,000	$3,000

For intermediate and higher volumes, glass wafers, NanoGetter® patterning on device wafers or other wafer diameters please contact us for a customized quote.

*There is a one-time tooling charge for all new wafer cap and NanoGetter® mask designs. Tooling charges for the NanoGetter® mask may not apply for eutectic and solder wafer bonding, contact us for discussions on your process and wafer cap design. Customer supplied masks may also reduce the tooling costs.

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