MEMS Integration
MEMS Applications
Bonding Process
MEMS Design Rules
Contact Us For MEMS Information
We provide “turnkey ” solutions for all your micromachining vacuum packaging needs. This includes getter integration, wafer bonding for chip-scale packages, ceramic packages and getter activation.
“NanoGetters® Technology has improved our ability to obtain and hold low pressures in our MEMS resonators. We consistently get high Q
values, as high as 20,000, with our resonators using NanoGetters®.”
- Jim Cripe, MEMS Test Engineer.
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