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MEMS Integration

  MEMS Applications
  Bonding Process
  MEMS Design Rules
  Contact Us For MEMS Information

We provide “turnkey ” solutions for all your micromachining vacuum packaging needs. This includes getter integration, wafer bonding for chip-scale packages, ceramic packages and getter activation.

“NanoGetters® Technology has improved our ability to obtain and hold low pressures in our MEMS resonators. We consistently get high Q values, as high as 20,000, with our resonators using NanoGetters®.”

- Jim Cripe, MEMS Test Engineer.


© 2003 NanoGetters®, Inc. is a registered trademark with the US Patent and Trademark Office. All rights reserved.