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MEMS Design Rules

NanoGetters® will provide design rules and other micromachine related recommendations for integrating NanoGetters® into the users product. A mask level is generally required to implement this vacuum improving technology. Surface topography will influence what method is used to patter NanoGetters®. If needed NanoGetters® personnel can provide design and CAD assistance.

Additional MEMS processing may be required to fully develop and integrate NanoGetters® technology into a micromachined product. Other MEMS processing steps can be performed by the user or other MEMS service providers.

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