 Applications
Any application that needs lower pressures, improved vacuum, or purer
gases, can benefit from NanoGetters®. The Nanogetters® act as an in-situ vacuum
pump to lower the gas pressure of the chamber. Using Nanogetters® reduces
the bakeout time of a vacuum system. The getters can be heated with
electrical current, an oven, RF energy or an internal heater.
Semiconductors
- Thin Film Deposition
Equipment
- MEMS Devices
- Optical and IR
Sensors
- Gas Purification
- Vacuum packaging
with ceramic packages
- Silicon wafers are
coated with NanoGetters® material, which can be heated inside the
process chamber, using a heated wafer chuck, pedestal or lamps.
NanoGetters® coated wafers from 100mm to 200mm in diameter are
available. These coated and heated wafers shorten the pump- down time
of semiconductor vacuum systems after preventive maintenance.
Particle Accelerators
- Dust Accelerator
- Synchrotron
- Colliders
- Storage Rings
- When multiple
NanoGetters® panels are used, a large gettering capacity can be
obtained.
Vacuum Tubes
- Cathode Ray Tubes
- Plasma Display
Panels
- Cryogenic Devices
- NanoGetters® can be
used in lamps or tubes where traditional evaporable barium getters
cannot be employed due to electrical leakage or capacitance effects.
NanoGetters® have successfully been used with frit sealing glass
processes.
Analytical Systems
- Mass Spectrometers
- Oscilloscopes
- Scanning Electron
Microscopes
- Transmission
Electron Microscopes
- Gas Purification
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